Dynasylan® TEOS UHP
Dynasylan® TEOS UHP is an ultra high purity grade of tetraethoxysilane.
Scope of Application
Dynasylan® TEOS UHP (tetraethyl orthosilicate, tetraethoxysilane) is a liquid silicon source that is used for deposition of doped and undoped silicon dioxide films of various types. It finds application in LPCVD, APCVD and PECVD processes and is used for trench filling, inter-level dielectrics layers and structures of similar type. Dynasylan® TEOS UHP is a stable, non-pyrophoric , non-corrosive liquid and therefore represents a preferable alternative in processes employing silane or similar compounds as source for silicon dioxide (e.g. TFT production).